Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6861666 | Apparatus and methods for determining and localization of failures in test structures using voltage contrast | Kurt H. Weiner, Gaurav Verma, Indranil De | 2005-03-01 |
| 6855568 | Apparatus and methods for monitoring self-aligned contact arrays using voltage contrast inspection | Kurt H. Weiner, Sanjay Tandon | 2005-02-15 |