Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6844922 | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus | Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens | 2005-01-18 |