Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930753 | Lithographic apparatus, device manufacturing method and device manufactured thereby | — | 2005-08-16 |
| 6844922 | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus | Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2005-01-18 |