Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899795 | Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers | Roman Schertler | 2005-05-31 |
| 6860977 | Method for manufacturing a workpiece using a magnetron sputter source | Bernd Heinz, Thomas Eisenhammer, Pius Grunenfelder, Walter Haag, Stanislav Kadlec +1 more | 2005-03-01 |