Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899795 | Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers | Martin Dubs | 2005-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899795 | Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers | Martin Dubs | 2005-05-31 |