Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6837966 | Method and apparatus for an improved baffle plate in a plasma processing system | Kouji Mitsuhashi, Hiroyuki Nakayama | 2005-01-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6837966 | Method and apparatus for an improved baffle plate in a plasma processing system | Kouji Mitsuhashi, Hiroyuki Nakayama | 2005-01-04 |