Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899786 | Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism | Shigeru Senzaki, Toshiki Sasaki, Tadashi Aoto, Nobuyuki Nagayama | 2005-05-31 |
| 6884516 | Internal member for plasma-treating vessel and method of producing the same | Yoshio Harada, Junichi Takeuchi, Tatsuya Hamaguchi, Nobuyuki Nagayama | 2005-04-26 |
| 6837966 | Method and apparatus for an improved baffle plate in a plasma processing system | Shinya Nishimoto, Hiroyuki Nakayama | 2005-01-04 |