Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979655 | Substrate processing method and substrate processing apparatus | Takayuki Niuya, Takehiko Orii, Hiroyuki Mori, Hiroshi Yano | 2005-12-27 |
| 6863741 | Cleaning processing method and cleaning processing apparatus | Takehiko Orii | 2005-03-08 |