Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979655 | Substrate processing method and substrate processing apparatus | Takehiko Orii, Hiroyuki Mori, Hiroshi Yano, Mitsunori Nakamori | 2005-12-27 |
| 6946701 | Method for forming a memory integrated circuit with bitlines over gates and capacitors over bitlines | — | 2005-09-20 |
| 6875288 | Cleaning agent and cleaning method | Hideto Gotoh, Hiroyuki Mori, Hiroshi Matsunaga, Fukusaburo Ishihara, Yoshiya Kimura +4 more | 2005-04-05 |
| 6838370 | Method of manufacturing semiconductor device and manufacturing apparatus | Michihiro Ono, Hideto Goto | 2005-01-04 |