Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973370 | Substrate processing apparatus and method for adjusting a substrate transfer position | Kazuhiko Ito, Kazutoshi Ishimaru, Michio Kinoshita, Yuichi Douki | 2005-12-06 |
| 6884294 | Coating film forming method and apparatus | Tomohide Minami, Shinichi Sugimoto, Takahiro Kitano, Hiroaki Kurishima | 2005-04-26 |