Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973370 | Substrate processing apparatus and method for adjusting a substrate transfer position | Kazuhiko Ito, Kazutoshi Ishimaru, Jun Ookura, Yuichi Douki | 2005-12-06 |
| 6915183 | Substrate processing apparatus and method of aligning substrate carrier apparatus | Naruaki Iida, Kazuhiko Ito | 2005-07-05 |