Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908864 | Pressure control method and processing device | Noriyuki Iwabuchi, Takeshi Yokouchi, Shingo Suzuki | 2005-06-21 |
| 6878233 | Workpiece holding mechanism | — | 2005-04-12 |
| 6849154 | Plasma etching apparatus | Kazunori Nagahata | 2005-02-01 |