KN

Kazunori Nagahata

TL Tokyo Electron Limited: 1 patents #112 of 433Top 30%
Overall (2005): #163,232 of 245,428Top 70%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6849154 Plasma etching apparatus Eiji Hirose 2005-02-01