Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950190 | Scatterometry for junction metrology | — | 2005-09-27 |
| 6898596 | Evolution of library data sets | David M. Aikens, Youxian Wen | 2005-05-24 |
| 6888632 | Modulated scatterometry | — | 2005-05-03 |