Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6898596 | Evolution of library data sets | Youxian Wen, Walter Lee Smith | 2005-05-24 |
| 6879449 | Broadband refractive objective for small spot optical metrology | David Y. Wang | 2005-04-12 |
| 6862090 | Coaxial illumination system | Jianhui Chen | 2005-03-01 |