PW

Peter D. Washabaugh

University of Michigan: 1 patents #42 of 189Top 25%
📍 Ann Arbor, MI: #135 of 467 inventorsTop 30%
🗺 Michigan: #1,426 of 5,720 inventorsTop 25%
Overall (2005): #122,573 of 245,428Top 50%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6942750 Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication Tsung-Kuan A. Chou, Khalil Najafi, Luis P. Bernal 2005-09-13