Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958566 | Mechanical resonator device having phenomena-dependent electrical stiffness | Wan-Thai Hsu | 2005-10-25 |
| 6954301 | Low-voltage electromechanical device including a tiltable microplatform, method of tilting same, array of such devices and method of setting dimple-to-substrate spacing | Yuan Xie | 2005-10-11 |
| 6917138 | Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices | — | 2005-07-12 |
| 6856217 | Micromechanical resonator device and micromechanical device utilizing same | John Ryan Clark | 2005-02-15 |
| 6846691 | Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby | Wan-Thai Hsu, John Ryan Clark | 2005-01-25 |