Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958566 | Mechanical resonator device having phenomena-dependent electrical stiffness | Clark T.-C. Nguyen | 2005-10-25 |
| 6930569 | Micromechanical resonator having short support beams | — | 2005-08-16 |
| 6846691 | Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby | John Ryan Clark, Clark T.-C. Nguyen | 2005-01-25 |