Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958850 | Pointing angle control of electrostatic micro mirrors with modified sliding mode control algorithm for precision control | Harshad S. Sane, Navid Yazdi | 2005-10-25 |
| 6912078 | Electrostatically actuated micro-electro-mechanical devices and method of manufacture | Thomas Kudrle, Marc Waelti, ChuanChe Wang, Gordon M. Shedd, Gregory A. Kirkos +2 more | 2005-06-28 |