Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6912078 | Electrostatically actuated micro-electro-mechanical devices and method of manufacture | Thomas Kudrle, Carlos H. Mastrangelo, Marc Waelti, ChuanChe Wang, Gregory A. Kirkos +2 more | 2005-06-28 |