Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967173 | Hydrogen plasma photoresist strip and polymeric residue cleanup processs for low dielectric constant materials | Mona Eissa | 2005-11-22 |
| 6958294 | Method for photoresist strip, sidewall polymer removal and passivation for aluminum metallization | Guoqiang Xing, David B. Aldrich | 2005-10-25 |
| 6838300 | Chemical treatment of low-k dielectric films | Changming Jin, Phillip D. Matz, Heungsoo Park, Andrew John McKerrow | 2005-01-04 |