Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967173 | Hydrogen plasma photoresist strip and polymeric residue cleanup processs for low dielectric constant materials | Patricia B. Smith | 2005-11-22 |
| 6939795 | Selective dry etching of tantalum and tantalum nitride | Troy A. Yocum | 2005-09-06 |