Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6875927 | High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications | Karl M. Brown, Cheng-Hsiung Tsai, Donny Young, David H. Loo | 2005-04-05 |
| 6837968 | Lower pedestal shield | Karl M. Brown, See-Eng Phan, Semyon Sherstinsky, Allen Lau | 2005-01-04 |