Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6875927 | High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications | Karl M. Brown, Cheng-Hsiung Tsai, Vineet Haresh Mehta, David H. Loo | 2005-04-05 |