Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969830 | Wafer chuck having thermal plate with interleaved heating and cooling elements | William Stone, Douglas S. Olsen | 2005-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969830 | Wafer chuck having thermal plate with interleaved heating and cooling elements | William Stone, Douglas S. Olsen | 2005-11-29 |