Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969830 | Wafer chuck having thermal plate with interleaved heating and cooling elements | Kenneth M. Cole, Sr., William Stone | 2005-11-29 |
| 6866094 | Temperature-controlled chuck with recovery of circulating temperature control fluid | Shawn M. Cousineau, Robert D. Kelso, David A. Stura | 2005-03-15 |