Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6881675 | Method and system for reducing wafer edge tungsten residue utilizing a spin etch | Jeng-Yang Pan, Chin-Te Huang, Chen-Yi Huang | 2005-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6881675 | Method and system for reducing wafer edge tungsten residue utilizing a spin etch | Jeng-Yang Pan, Chin-Te Huang, Chen-Yi Huang | 2005-04-19 |