Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6881675 | Method and system for reducing wafer edge tungsten residue utilizing a spin etch | Chin-Te Huang, Chen-Yi Huang, Sheng-Wen Chen | 2005-04-19 |
| 6875705 | Method of high selectivity wet etching of salicides | Chao-Jie Tsai, Chin-Nan Wu, Meng-Chang Liu, Su-Yu Yeh | 2005-04-05 |