Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968753 | Vibration-dampening base for ball-type lead screw of load port transfer system | Huan-Liang Tzeng, Tzu-Chieh Chou | 2005-11-29 |
| 6863772 | Dual-port end point window for plasma etcher | Huan-Liang Tzeng, Jung-Hsiang Chang | 2005-03-08 |
| 6844082 | Gas distribution plate with anodized alumnium coating | Huan-Liang Tzeng, Jung-Hsiang Chang | 2005-01-18 |