Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6863772 | Dual-port end point window for plasma etcher | Ping-Jen Cheng, Huan-Liang Tzeng | 2005-03-08 |
| 6844082 | Gas distribution plate with anodized alumnium coating | Huan-Liang Tzeng, Ping-Jen Cheng | 2005-01-18 |