Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958249 | Method to monitor process charging effect | Jiann-Tyng Tzeng, Yuh-Hwa Chang | 2005-10-25 |
| 6947196 | Trench-embedded mirror structure for double substrate spatial light modulator | Yuh-Hwa Chang, Jiann-Tyng Tzeng | 2005-09-20 |