Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958249 | Method to monitor process charging effect | Yuh-Hwa Chang, Jiun Nan Chen | 2005-10-25 |
| 6947196 | Trench-embedded mirror structure for double substrate spatial light modulator | Jiun Nan Chen, Yuh-Hwa Chang | 2005-09-20 |
| 6929969 | Reflective spatial light modulator mirror device manufacturing process and layout method | Yuh-Hwa Chang | 2005-08-16 |
| 6841081 | Method for manufacturing reflective spatial light modulator mirror devices | Yuh-Hwa Chang | 2005-01-11 |