Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6981240 | Cutting patterns for full phase shifting masks | Christophe Pierrat | 2005-12-27 |
| 6978436 | Design data format and hierarchy management for phase processing | Christophe Pierrat | 2005-12-20 |
| 6861204 | Design and layout of phase shifting photolithographic masks | Christophe Pierrat | 2005-03-01 |
| 6852471 | Exposure control for phase shifting photolithographic masks | Christophe Pierrat | 2005-02-08 |