Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950297 | Electrostatic chuck and manufacturing method therefor | — | 2005-09-27 |
| 6872908 | Susceptor with built-in electrode and manufacturing method therefor | Takeshi Ootsuka, Kazunori Endou | 2005-03-29 |
| 6838646 | Susceptor device | Hiroshi Inazumachi | 2005-01-04 |