Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872908 | Susceptor with built-in electrode and manufacturing method therefor | Takeshi Ootsuka, Mamoru Kosakai | 2005-03-29 |
| 6863281 | Chucking apparatus and production method for the same | Hiroshi Inazumachi | 2005-03-08 |