Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965115 | Airtight processing apparatus, airtight processing method, and electron beam processing apparatus | Naoki Yasumitsu, Eiichi Hiraoka | 2005-11-15 |
| 6925355 | Substrate transfer device | Hidehiko Mori, Kazutoshi Sakaki | 2005-08-02 |