Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965115 | Airtight processing apparatus, airtight processing method, and electron beam processing apparatus | Eiichi Hiraoka, Yoshiyuki Tomita | 2005-11-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965115 | Airtight processing apparatus, airtight processing method, and electron beam processing apparatus | Eiichi Hiraoka, Yoshiyuki Tomita | 2005-11-15 |