Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974963 | Substrate inspecting device, coating/developing device and substrate inspecting method | Makoto Kiyota, Takashi Aiuchi, Ryouichi Uemura | 2005-12-13 |
| 6969649 | Method of manufacturing semiconductor integrated circuit devices having a memory device with a reduced bit line stray capacity and such semiconductor integrated circuit devices | Toshihiro Sekiguchi, Yoshitaka Tadaki, Keizo Kawakita, Hideo Aoki, Toshikazu Kumai +6 more | 2005-11-29 |