Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6963052 | Heater module for semiconductor manufacturing equipment | Akira Kuibira | 2005-11-08 |
| 6946625 | Ceramic susceptor | Akira Kuibira, Masuhiro Natsuhara | 2005-09-20 |
| 6881128 | Ceramics base plate and method for producing the same | Masuhiro Natsuhara | 2005-04-19 |