Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6963052 | Heater module for semiconductor manufacturing equipment | Hirohiko Nakata | 2005-11-08 |
| 6946625 | Ceramic susceptor | Masuhiro Natsuhara, Hirohiko Nakata | 2005-09-20 |
AK
Akira Kuibira
Overall (2005): #64,343 of 245,428Top 30%
2
Patents 2005