Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974558 | Susbstrate material for mounting a semiconductor device, substrate for mounting a semiconductor device, semiconductor device, and method of producing the same | Shinichi Yamagata, Yugaku Abe, Makoto Imamura, Yoshishige Takano, Takatoshi Takikawa +1 more | 2005-12-13 |
| 6921193 | Chemical concentration control device for semiconductor processing apparatus | — | 2005-07-26 |
| 6876075 | Aluminum-silicon carbide semiconductor substrate and method for producing the same | — | 2005-04-05 |