Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979645 | Method of producing a semiconductor device having copper wiring | Hiroshi Horikoshi, Takeshi Nogami | 2005-12-27 |
| 6911396 | Method of producing metallic film | Shuzo Sato, Takeshi Nogami | 2005-06-28 |
| 6855634 | Polishing method and polishing apparatus | Shuzo Sato, Akira Yoshio, Takeshi Nogami | 2005-02-15 |