Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979645 | Method of producing a semiconductor device having copper wiring | Hiroshi Horikoshi, Yuji Segawa | 2005-12-27 |
| 6911396 | Method of producing metallic film | Shuzo Sato, Yuji Segawa | 2005-06-28 |
| 6878632 | Semiconductor device having a conductive layer with a cobalt tungsten phosphorus coating and a manufacturing method thereof | Naoki Komai, Hideyuki Kito, Mitsuru Taguchi | 2005-04-12 |
| 6855634 | Polishing method and polishing apparatus | Shuzo Sato, Yuji Segawa, Akira Yoshio | 2005-02-15 |
| 6846227 | Electro-chemical machining appartus | Shuzo Sato, Zenya Yasuda, Masao Ishihara, Hiizu Ootorii, Naoki Komai | 2005-01-25 |