Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6906790 | Reticle manipulators and related methods for conveying thin, circular reticles as used in charged-particle-beam microlithography | Akihiro Yamamoto | 2005-06-14 |
| 6900878 | Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same | Yukiharu Okubo | 2005-05-31 |
| 6885437 | Mask exchanging method and exposure apparatus | Kenji Nishi, Katsunobu Ogura | 2005-04-26 |
| 6842886 | Basic cell of gate array semiconductor device, gate array semiconductor device, and layout method for gate array semiconductor device | Kenji Arai | 2005-01-11 |