Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977377 | Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus | — | 2005-12-20 |
| 6953944 | Scanning device and method including electric charge movement | Yoshiaki Kohama, Akihiro Goto, Muneki Hamashima | 2005-10-11 |
| 6900878 | Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same | Hidekazu Kikuchi | 2005-05-31 |