Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6914007 | In-situ discharge to avoid arcing during plasma etch processes | Ching-Hui Ma, Chao-Cheng Chen, Tsang-Jiuh Wu, Hun-Jan Tao | 2005-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6914007 | In-situ discharge to avoid arcing during plasma etch processes | Ching-Hui Ma, Chao-Cheng Chen, Tsang-Jiuh Wu, Hun-Jan Tao | 2005-07-05 |