Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6891171 | Method for repairing a phase shift mask and a focused ion beam apparatus for carrying out method | Yoshihiro Koyama | 2005-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6891171 | Method for repairing a phase shift mask and a focused ion beam apparatus for carrying out method | Yoshihiro Koyama | 2005-05-10 |