Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6891171 | Method for repairing a phase shift mask and a focused ion beam apparatus for carrying out method | Ryoji Hagiwara | 2005-05-10 |
| 6868302 | Thermal processing apparatus | Toshiyuki Kobayashi, Mitsukazu Takahashi | 2005-03-15 |