Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943349 | Multi beam charged particle device | Pavel Adamec, Ralf Degenhardt, Harry Munack, Dieter Winkler | 2005-09-13 |
| 6936817 | Optical column for charged particle beam device | — | 2005-08-30 |