Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943349 | Multi beam charged particle device | Ralf Degenhardt, Hans-Peter Feuerbaum, Harry Munack, Dieter Winkler | 2005-09-13 |
| 6943507 | Device and method for controlling focussed electron beams | Dieter Winkler | 2005-09-13 |